2020.11.06
2020.11.06 Yelim Song*, Fumio Kawam…
2020.11.6 Yelim Song*, Fumio Kawamura*, Kiyoshi Shimamura, Naoki Ohashi, Development of a flux-film-coated sputtering (FFC-sputtering) method for fabricating c-axis oriented AlN film, AIP Advances. 10, 115011, Nov. 2020, DOI:10.1063/5.0025736