2021.01.01
2021.01.01 S. Fujie, A. Ito*, Pr…
2021.01.01
S. Fujie, A. Ito*, Precursor selection for metal-organic chemical vapor deposition of SrHfO3 films with Sr(dpm)2 and Sr(hfa)2, J. Ceram. Soc. Japan, 129, 17, Jan. 2021. (DOI:10.2109/jcersj2.20157)